Keywords
Citation
Rigelsford, J. (2004), "Method of preparing manufacturing specifications", Assembly Automation, Vol. 24 No. 3. https://doi.org/10.1108/aa.2004.03324cad.005
Publisher
:Emerald Group Publishing Limited
Copyright © 2004, Emerald Group Publishing Limited
Method of preparing manufacturing specifications
Method of preparing manufacturing specifications
Keywords: Manufacturing, Production control, Patents
Applicant: Kabushiki Kaisha Toshiba, JapanPatent number: US6,516,237Publication date: 4 February 2003Title: System for and method of preparing manufacturing process specifications and production control system
This patent provides a system for preparing and controlling manufacturing-process specifications, capable of equally handling production control and simulation and effectively utilizing simulation results. It includes a method of preparing process data for the system, and a method of manufacturing semiconductor devices with the use of the system.
The system comprises: a database for storing process data that includes manufacturing-process specifications applied to apparatuses to carry out manufacturing processes and parameters used to simulate the manufacturing processes; a production control system for controlling the apparatuses according to the process data, and collecting data measured through the manufacturing processes; a simulation system for simulating the manufacturing processes according to the process data; and an editing unit for correcting the parameters according to the collected data and amending the manufacturing- process specifications according to a result of the simulation.