Low friction rotating devices using fluid assisted levitation
Mark Leonard
(Mark Leonard is based at Department of Computing and Electrical Engineering, Heriot‐Watt University, Riccarton, Edinburgh EH 14 4AS, UK)
Resh Dhariwal
(Resh Dhariwal is based at Department of Computing and Electrical Engineering, Heriot‐Watt University, Riccarton, Edinburgh EH 14 4AS, UK)
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Abstract
Describes the fabrication of MEMS micro bearings and the benefits that they provide. Uses the LIGA process with UV light and SU‐8 photoresist to create the structures. A fluid passing through the cavity is used to lift up and levitate the rotor within the confines of the cavity.
Keywords
Citation
Leonard, M. and Dhariwal, R. (2002), "Low friction rotating devices using fluid assisted levitation", Assembly Automation, Vol. 22 No. 1, pp. 55-59. https://doi.org/10.1108/01445150210416682
Publisher
:MCB UP Ltd
Copyright © 2002, MCB UP Limited